JPH0390435U - - Google Patents
Info
- Publication number
- JPH0390435U JPH0390435U JP15167589U JP15167589U JPH0390435U JP H0390435 U JPH0390435 U JP H0390435U JP 15167589 U JP15167589 U JP 15167589U JP 15167589 U JP15167589 U JP 15167589U JP H0390435 U JPH0390435 U JP H0390435U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- metal case
- slide plate
- processing chamber
- mounting structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 3
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15167589U JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15167589U JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390435U true JPH0390435U (en]) | 1991-09-13 |
| JP2510965Y2 JP2510965Y2 (ja) | 1996-09-18 |
Family
ID=31697963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15167589U Expired - Lifetime JP2510965Y2 (ja) | 1989-12-28 | 1989-12-28 | 半導体製造装置に於ける熱電対取付け構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2510965Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08261844A (ja) * | 1995-03-17 | 1996-10-11 | Kokusai Electric Co Ltd | 高温炉用の炉内温度測定器 |
| JP2022547858A (ja) * | 2019-09-13 | 2022-11-16 | オンポイント テクノロジーズ リミテッド ライアビリティ カンパニー | 多機能サイトポートおよび多機能サイトポートを設置する方法 |
-
1989
- 1989-12-28 JP JP15167589U patent/JP2510965Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08261844A (ja) * | 1995-03-17 | 1996-10-11 | Kokusai Electric Co Ltd | 高温炉用の炉内温度測定器 |
| JP2022547858A (ja) * | 2019-09-13 | 2022-11-16 | オンポイント テクノロジーズ リミテッド ライアビリティ カンパニー | 多機能サイトポートおよび多機能サイトポートを設置する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2510965Y2 (ja) | 1996-09-18 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |